ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). reassignment TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.) Filing date Publication date Priority to US15343909P priority Critical Application filed by Taiwan Semiconductor Manufacturing Co TSMC Ltd filed Critical Taiwan Semiconductor Manufacturing Co TSMC Ltd Priority to US12/619,464 priority patent/US8368180B2/en Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. Original Assignee Taiwan Semiconductor Manufacturing Co TSMC Ltd Priority date (The priority date is an assumption and is not a legal conclusion.
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Taiwan Semiconductor Manufacturing Co TSMC Ltd Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.) ( en Inventor Chen-Hua Yu Shin-puu Jeng Hao-Yi Tsai Shang-Yun Hou Hsien-Wei Chen Ming-Yen Chiu Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.) Active, expires Application number US12/619,464 Other versions US20100207251A1
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Metal scribe pdf#
Google Patents Scribe line metal structureÄownload PDF Info Publication number US8368180B2 US8368180B2 US12/619,464 US61946409A US8368180B2 US 8368180 B2 US8368180 B2 US 8368180B2 US 61946409 A US61946409 A US 61946409A US 8368180 B2 US8368180 B2 US 8368180B2 Authority US United States Prior art keywords dummy dummy lines lines conductive layer vias Prior art date Legal status (The legal status is an assumption and is not a legal conclusion. Google Patents US8368180B2 - Scribe line metal structure US8368180B2 - Scribe line metal structure